Applicable Pressure range of the
Effects of bubbles in liquid
Simplicity of refill system
Required temperature to vaporize
Table 1. Performance table systemsaremountedhorizontally. Depending
Mechanical Considerations upon the chemistry employed, the vaporizer
module can run at high temperatures thereby
requiring thermal isolation from nearby electronics as well as providing for operator safety.
One part of the system that requires special
consideration is the chemical delivery system
that provides a flow of precursor to the MFC.
These liquids are usually kept in a bulk refill
system that supports multiple flash systems.
The refill systems deliver the liquid by means of
a pressurized vessel or via a pump. Due to the
constant pressure required for the source liquid
material, flash systems require a very tight control of incoming liquid precursor material pressure. This may lead to a more complex refill
system than would otherwise be necessary.
Typical flash systems occupy less than one
quarter of a cubic foot (depending upon the
manufacturer) and lend themselves to locations much closer to the process chamber. The
Flash systems are capable of providing
(under the correct conditions) stable vapor
delivery with a wide variety of materials
over a wide variety of temperature ranges.
Additionally, flash systems have the smallest
footprint of the three systems considered
here. However, depending on model and the
material to be vaporized flash systems may
be prone to stability and maintenance issues.
With vaporization taking place on a heated
surface and at high temperatures, flash vaporizers are sometimes prone to the build up of
materials on the vaporizing surface. This can
lead to higher down time for maintenance as
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Single and multi-channel systems are available.
24 Vdc Loop Powered,
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Audio and Visual Alarms
4-20 mA Signal Output
Wall, Panel or Rack Mount
For 24 Vdc, 2, 3 and 4 wire
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P.O. Box 979, Ann Arbor, MI. 48106 Phone: 734-761-1270 FAX: 734-761-3220