6. SEMI F20 Specification for 316L Stainless Steel Bar, Forgings, Extruded Shapes,
Plate, and Tubing for Components use in
General Purpose, High Purity and Ultra-High Purity Semiconductor Manufacturing Applications.
BARBARA K. HENON, PH.D., IS A CONTRACT
EMPLOYEE FOR ARC MACHINES, INC., 10500
ORBITAL WAY, PACOIMA, CALIFORNIA 91331.
DR. HENON JOINED ARC MACHINES IN 1984.
SHE WAS AN INSTRUCTOR IN THE ARC MACHINES
TRAINING DEPAR TMEN T AND WROTE TRAINING MANUALS
FOR WELDING OPERATORS. FROM 1984 TO 1994 SHE
PERFORMED ORBITAL WELDING TRAINING FOR OPERA TORS
IN THE FIELD FOR
SEMICONDUCTOR,
BIOPHARMACEUTICAL
AND OTHER
INDUSTRIES THAT
SPECIFY ORBITAL TUBE
WELDING. DR. HENON
JOINED THE ASME
BIOPROCESSING EQUIPMENT (BPE) STANDARDS
COMMITTEE IN 1989 AND SERVED FOR TWO TERMS
AS VICE CHAIR OF THE MAIN COMMITTEE. SHE IS
CURRENTLY A MEMBER OF THE BPE MATERIALS
JOINING AND SURFACE FINISHES SUBCOMMITTEES AND
THE SUBCOMMI T TEE ON GENERAL REQUIREMEN TS. SHE
IS THE OFFICIAL LIAISON BETWEEN THE ASME BPE
AND ASME B31.3 PROCESS PIPING COMMITTEE
WHICH IS CURRENTLY WRITING A HIGH-PURITY
CHAPTER. SHE WAS A MEMBER OF THE TASK FORCE
THAT WROTE THE SEMI F79 AND F81 STANDARDS
FOR ORBITAL WELDING IN THE SEMICONDUCTOR
INDUSTRY. SHE ALSO SERVES ON THE AMERICAN
WELDING SOCIETY (AWS) D10 COMMITTEES AND
D18 COMMITTEES. HENON CAN BE FOUND ON THE
ARC MACHINES, INC. WEBSITE, WW W.ARCMACHINES.
COM UNDER APPLICA TIONS. SHE CAN ALSO BE REACHED
AT BARBARA.HENON@ARCMACHINES.COM OR AT
206-546-9601.
(Continued from page 10)
RASIRC Steamer
Steam Purifier
One SPA failure in 48 months
Lamp failure
One lamp failure in 48 months
(Recommended PM every 6 months)
Table 2. Downtime comparison
Pyrolytic Torch
Torch Temperature Controller
Typical 6-month lifetime between repair
Flame Detector
Typical 3-month operation between adjustments
Gas Supply Interruption
Typical 6-month span between interruptions due to operation
inattention or miscalculation
$180 in savings over each 2.7µm pyro-based
oxidation run
Component R&R: expensive torch ele-
ments or high-current controllers are
replaced with a quartz lamp
Cycle time: the steamer delivers an approx-
imate 7% reduction in oxidation time.
Summary
Our steamer proved to be a cost effec-
tive alternative to the pyrolytic torch for
the MEMS manufacturer’s operation. The
company is now able to expand operations
without increasing gas facilities and has the
ability to completely eliminate hydrogen
from its wet thermal oxidation processes.
The conversion to steamers enabled them
to use this hydrogen to expand other
processes while still growing the thermal
oxide process capability. Extensive testing
showed that that our steamer increased
growth rate, improved uniformity, increased
reliability, and provided a safer operat-
ing environment, while at the same time
reduced costs for consumables, mainte-
nance, and components. The rapid ROI of
better than six months continues to benefit
the MEMs manufacturer who undertook
this comparison and collection of data.
JEFFREY SPIEGELMAN IS PRESIDENT OF
RASIRC, 11760 SORRENTO VALLEY ROAD,
SAN DIEGO, CA, 92121. HE HOLDS A BS IN
BIOENGINEERING AND MS IN APPLIED MECHANICS
FROM UNIVERSITY OF CALIFORNIA AT SAN DIEGO.
HE HAS OVER 50 INTERNATIONAL PATENTS AND
PUBLICATIONS. PREVIOUSLY, HE WAS FOUNDER AND
PRESIDENT OF AERONEX UNTIL IT WAS PURCHASED
BY ENTEGRIS IN 2003. IN 2005, HE FOUNDED
RASIRC TO ADDRESS PROCESS PURIT Y AND DELIVER Y
ISSUES AROUND NEXT GENERATION CHEMISTRIES,
WITH AN INITIAL FOCUS ON WATER VAPOR. HE CAN BE
REACHED AT 858-259-1220 OR JS@RASIRC.COM
