Alternative Method for Steam Generation for Thermal Oxidation of Silicon JEFFREY J. SPIEGELMAN An account of how steamer technology—as opposed to the pyrolytic torch—for the MEMS manufacturer’s operation can eliminate hydrogen in thermal oxidation and increase growth rate, uniformity, and reliability

11

Orbital Welding of Semiconductor Process Gas Lines BARBARA K. HENON, PH.D. A discussion of the advances in semiconductor welding that meet standards and contribute to better, cleaner, and more repeatable welds

18

Reducing Costs Using Wireless Sensors for Cylinder Monitoring: A Case Study BY PAUL NESDORE How non-invasive sensors can monitor key cylinder characteristics such as pressure and weight to reduce downtime and man-hours

22

Tailoring Photovoltaic Component Specifications to Industry Needs JOHN BAX TER: MANAGER, PRODUC TS AND TECHNOLOGY, SWAGELOK COMPANY A discussion of how one manufacturer has addressed the needs for stainless steel standards in the photovoltaic industry.

DEPARTMENTS

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Editorial 26
News 30
International News 33
Company Profile: Delta-F 34
Photovoltaic Features and News 34

Golden Gas Award Nominees PIT TCON Product Showcase New Products Calendar Ad Index

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On the Cover: Cypress Envirosystems’ Wireless

Gauge Reader digitizing and transmitting dial gauge readings in a Micrel fab.

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