Hardness, Shore A (ASTM D2240)
Tensile Strength, psi (AS TM D1414)
Elongation, (ASTM D1414)
Modulus at 100%, psi (ASTM D1414)
sealing technology as the semiconductor
industry continues moving forward.
Figure 4. Physical property comparisons are not necessarily indicators of seal performance.
conductor Equipment and Materials International (SEMI) trade association to push
for the development of a SEMI Standard
for O-rings. A task force has already been
established. Participants from leading chip
makers, equipment suppliers and seal manufacturers attended our first meeting in mid-January. Our objective is to begin defining
parameters such as stress relaxation under
temperature that may lead to a universally
accepted means of measuring some true
performance criteria for seals.
Note: As part of its commitment to industry
education, Applied Seals North America offers technical seminars and customer training – both in-house and at open technical
forums at industry conferences such as the
SEMICON West trade show in July – to stimulate discussion and share its experience regarding how the right sealing solutions can
improve the efficiencies of everything from
preventive maintenance cycles to fab-wide
The next article in this series will address the
evolving role of seals as manufacturing technologies advance.
1. Viton is a registered trademark of DuPont
Performance Elastomers L.L.C.
2. Perfrez is a registered trademark of Applied
Seals Co., Ltd.
In the fast-paced world of semiconductor
manufacturing, it’s important to remember
the old adage that you cannot judge a book
by its cover. In the case of sealing compo-
nents, quickly grabbing a look-alike seal from
the spare parts inventory may not provide
the best solution – and may even result in
contamination and downtime problems.
DALIA VERNIKOVSK Y IS CHIEF EXECU TIVE AND
FOUNDER OF APPLIED SEALS NOR TH AMERICA INC.,
39899 BALENTINE DRIVE, SUITE 368, NEWARK,
CA 94560. SHE CAN BE REACHED AT 510-623-
8307 OR DALIA@APPLIEDSEALSGLOBAL.COM.
Gas Sampling Monitor
With Programmable Relays for Control Functions
The GSM-60 is ideal for monitoring a wide variety of gases used in
laboratories, research and pilot plant development facilities, processing
plants, etc. Depending on the particular gas, concentrations monitored/
controlled range from sub-ppm to percent by volume, or LEL.
■ Designed for Monitoring:
•;Scrubber Exhaust;•;Tank Headspaces
•;Gas Cabinets;• Process Areas
■ Up to Four Internal Sensors, or Option of Up to Three 4-20 mA Inputs
■ User Programmable Alarm Relays
■;Sensor Options: PID, IR, MOS & EC
■ Long List of Gases Monitored, including:
Dew Point, LEL Hydrocarbons, O3, HF, HCl, Cl2, VOCs, CO, CO2, ETO, H2, O2, SO2, NO, NO2, HCN, Hydrides, NH3 etc.
Monitor with sampling pump can have up to 4 internal sensors or up to 3 remote 24 VDC, 4-20 mA sensor/transmitters.
with Internal Sampling Pump
www.enmet.com email@example.com Phone: 734-761-1270 Fax: 734-761-3220 Ann Arbor, Michigan