Gases & Instrumentation - March/April 2011

Color Hardness, Shore A (ASTM D2240) Tensile Strength, psi (AS TM D1414) Elongation, (ASTM D1414) Modulus at 100%, psi (ASTM D1414)

Seal #1
Black
75
1,900
200
825

Seal #2
Black
78
1,673
170
1,014

Seal #3
White
80
2,363
159
1,087

Seal #4
White
80
1,600
165
1,050

sealing technology as the semiconductor industry continues moving forward.

Figure 4. Physical property comparisons are not necessarily indicators of seal performance.

conductor Equipment and Materials International (SEMI) trade association to push for the development of a SEMI Standard for O-rings. A task force has already been established. Participants from leading chip makers, equipment suppliers and seal manufacturers attended our first meeting in mid-January. Our objective is to begin defining parameters such as stress relaxation under temperature that may lead to a universally accepted means of measuring some true performance criteria for seals.

Note: As part of its commitment to industry education, Applied Seals North America offers technical seminars and customer training – both in-house and at open technical forums at industry conferences such as the SEMICON West trade show in July – to stimulate discussion and share its experience regarding how the right sealing solutions can improve the efficiencies of everything from preventive maintenance cycles to fab-wide productivity.

The next article in this series will address the evolving role of seals as manufacturing technologies advance.

1. Viton is a registered trademark of DuPont Performance Elastomers L.L.C.

2. Perfrez is a registered trademark of Applied Seals Co., Ltd.

Summary

In the fast-paced world of semiconductor
manufacturing, it’s important to remember
the old adage that you cannot judge a book
by its cover. In the case of sealing compo-
nents, quickly grabbing a look-alike seal from
the spare parts inventory may not provide
the best solution – and may even result in
contamination and downtime problems.

DALIA VERNIKOVSK Y IS CHIEF EXECU TIVE AND FOUNDER OF APPLIED SEALS NOR TH AMERICA INC., 39899 BALENTINE DRIVE, SUITE 368, NEWARK, CA 94560. SHE CAN BE REACHED AT 510-623- 8307 OR DALIA@APPLIEDSEALSGLOBAL.COM.

Gas Sampling Monitor

With Programmable Relays for Control Functions

The GSM-60 is ideal for monitoring a wide variety of gases used in laboratories, research and pilot plant development facilities, processing plants, etc. Depending on the particular gas, concentrations monitored/ controlled range from sub-ppm to percent by volume, or LEL.

■ Designed for Monitoring: •;Scrubber Exhaust;•;Tank Headspaces •;Gas Cabinets;• Process Areas

■;Digital Display

■ Up to Four Internal Sensors, or Option of Up to Three 4-20 mA Inputs

■ User Programmable Alarm Relays

■;Sensor Options: PID, IR, MOS & EC

■ Long List of Gases Monitored, including: Dew Point, LEL Hydrocarbons, O3, HF, HCl, Cl2, VOCs, CO, CO2, ETO, H2, O2, SO2, NO, NO2, HCN, Hydrides, NH3 etc.