Director Technology Development, Swagelok

12 The Care and Handling of Seals

B Y DALIA VERNIKOVSKY

This article is the second in a three-part series on high-technology sealing components used to create and safeguard ultraclean manufacturing environments.

15 Company Profile: Cambridge Sensotec
16

Live Gas Characterization for Semiconductor Process Tools: Part I DR. SOWMYA KRISHNAN A discussion of the necessity to test critical fab components with the actual gas used in the process instead of relying on surrogate gas testing, which could prove erroneous, leading to costly product loss.

21
Golden Gas Awards Short List Finalists
26
30

Gas-Phase Air Purification Battles Industrial Electronics Corrosion NICK AGOPIAN An examination of how air-phase filtration can eliminate gaseous contaminants to prevent electronic component failure that could lead to costly production down-time.

Laser-Based Analyzers and the Future of Molecular Process Control PAUL NESDORE Laser-based gas analyzers are transforming the practice of process control in markets that range from semiconductor fabrication to natural gas distribution. This article discusses the mounting competition of laser-based analysis, the technical advantages, and how this technology is developing new business models for gas analysis.

DEPARTMENTS
4
5
7
8

Editorial
Paul Nesdore
Editor
pnesdore@gasesmag.com
Gail Glintenkamp
Executive Editor
gglintenkamp@gasesmag.com
Maggie Y.M. Lee
Editor-at-Large
mlee@gasesmag.com
Ludwig Haase
Technical Editor
Beth Hinchliffe
Editorial Consultant
Estrelita Roy
Senior News Editor
Art and Production
Alice Scofield
ascofield@gasesmag.com
Administration
Paul Nesdore
CEO/Publisher
pnesdore@gasesmag.com
Advertising Sales
Robin Camirand
rcamirand@gasesmag.com
Customer Service
service@gasesmag.com
Executive Offices
Meta Word Inc.
Wellesley, MA 02481
Phone: 781-431-7168/Fax 781-431-2696
www.gasesmag.com

34 Calendar
34 AD INDEX
Editorial
News
International News
News in-depth: Air products ammonia
generation plant in China

On the Cover: Photo courtesy Cascade Technologies:
Shown is a QCL based micro leak detection
and rejection for fast aerosol fill lines.

Gases & Instrumentation Magazine™ (ISSN 1937-6774) is published six times per year, by MetaWord, Inc. 77 Elmwood Road, Wellesley Hills, MA 02481. and at additional mailing office. A requester publication, Gases & Instrumentation Magazine™ is distributed free to qualified subscribers in North America. Non-qualified subscription rates in the U.S and Canada: $120 per year. All other countries: $180 per year, payable in U.S. funds. Back issues may be purchased at a cost of $15 each in the U.S. and $20 elsewhere. While every attempt is made to ensure the accuracy of the information contained herein, the publisher and its employees cannot accept responsibility for the correctness of information supplied, advertisements, or opinions expressed. POSTMASTER: Send address changes to Gases & Instrumentation Magazine™, 77 Elmwood Road, Wellesley Hills, MA 02481. ©2008 Gases & Instrumentation Magazine™ by Meta Word, Inc. All rights reserved. No part of this publication may be reproduced without permission from the publisher. Permission is granted for those registered with the Copyright Clearance Center, Inc. (CCC), 222 Rosewood Drive, Danvers, MA 01923 (phone: 978-750-8400; fax: 978-750-4470) to photocopy articles for a base fee of $1 per copy of the article plus $.35 per page. Canadian Agreement number: PM40063731; Return Undeliverable Canadian Addresses to: Station A P. O. Box 54 Windsor, Ontario N9A 6J5; Email: returnsil@imex.pb.com

Note: Gases & Instrumentation periodically publishes product-related articles about the technology of new products or innovative technologies introduced into existing products. This is to explain the technology in a non-commercial way to inform potential end-users of technology that may suit their application. Gases & Instrumentation does not verify the test results noted, nor does Gases & Instrumentation endorse these products. The technology is presented for informational purposes only.