Director Technology Development, Swagelok
12 The Care and Handling of Seals
B Y DALIA VERNIKOVSKY
This article is the second in a three-part series on high-technology sealing components
used to create and safeguard ultraclean manufacturing environments.
15 Company Profile: Cambridge Sensotec
Live Gas Characterization for Semiconductor Process Tools:
DR. SOWMYA KRISHNAN
A discussion of the necessity to test critical fab components with the actual gas used in the
process instead of relying on surrogate gas testing, which could prove erroneous, leading
to costly product loss.
Golden Gas Awards Short List Finalists
Gas-Phase Air Purification
Battles Industrial Electronics Corrosion
An examination of how air-phase filtration can eliminate gaseous contaminants to prevent
electronic component failure that could lead to costly production down-time.
and the Future of Molecular Process Control
Laser-based gas analyzers are transforming the practice of process control in markets that
range from semiconductor fabrication to natural gas distribution. This article discusses
the mounting competition of laser-based analysis, the technical advantages, and how this
technology is developing new business models for gas analysis.
Maggie Y.M. Lee
Senior News Editor
Art and Production
Meta Word Inc.
Wellesley, MA 02481
Phone: 781-431-7168/Fax 781-431-2696
34 AD INDEX
News in-depth: Air products ammonia
generation plant in China
On the Cover: Photo courtesy Cascade Technologies:
Shown is a QCL based micro leak detection
and rejection for fast aerosol fill lines.
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